基于MEMS侧面输出的压力传感器设计

冯飞 续睿玲 秦丽

摘 要：为了解决应用正面压力传感器测量光纤打弯导致光损耗增加的问题，提出了一种应用侧面输出的压力传感器设计方案。对45°的斜面光纤和法珀压力传感器中MEMS工艺键合的敏感单元进行激光焊接，制成了基于MEMS侧面输出的压力传感器。搭建了侧面输出的MEMS压力传感器的测试装置，通过光谱仪对检测信号进行了解调，并对所得数据进行了分析计算。结果表明，传感器的腔长与所加的压力呈现线性关系，其灵敏度为3.048 μm/MPa。应用侧面输出压力传感器更有利于管道壁面压力的测量，光信号更容易转换成电信号，减少了光的模式之间的干扰，有助于减少光的损耗。所得结果对狭窄空间和恶劣环境下的管道测量工作提供了更多选择，对实现管道内壁压力的精确测量具有一定的借鉴价值。

关键词：传感器技术;侧面输出;光纤法珀;MEMS;光损耗

中图分类号：TB21   文献标识码：A

DOI： 10.7535/hbgykj.2021yx02004

Design of pressure sensor based on MEMS side output

FENG Fei1，2， XU Ruiling1，2， QIN Li1，2

（1.Key Laboratory of Instrumentation Science and Dynamic Measurement， North University of China， Taiyuan，Shanxi 030051， China;2.Key Laboratory Science and Technology on Electronic Test and Measurement，North University of China， Taiyuan，Shanxi 030051， China）

Abstract：In order to solve the problem of the increase of the light loss caused by the bending of the optical fiber measured by the front pressure sensor，a design scheme of the side output pressure sensor was proposed. A pressure sensor based on MEMS side output was fabricated with the laser welding of 45 ° inclined fiber and the sensing unit of MEMS （Micro Electro Mechanical Systems） bonding process in Fabry-Perot pressure sensor. The testing device of MEMS pressure sensor with side output was built，the detection signal was mediated by spectrometer，and the obtained data was analyzed and calculated. The results show that the cavity length of the sensor has a linear relationship with the applied pressure，and its sensitivity is 3.048 μm/MPa. The application of side output pressure sensor is more conducive to the measurement of pipe wall pressure，and the optical signal is easier to be converted into electrical signal， which reduces the interference between light modes and helps cut the loss of light. The results provide more choices for pipeline measurement in narrow space and harsh environment，and have a certain reference for realizing accurate measurement of pipeline inner wall pressure.

Keywords：sensor technology; side output; fiber Fabry-Perot; MEMS;optical loss

從20世纪70年代初开始，光纤传感器伴随着光纤传感和光纤通信等技术的成熟飞速发展[1]。与基于电学传感原理的传统传感器不同，光纤传感器是通过转换电信号进行传输的[2]。因此，传统的传感器会受到使用环境的限制，例如：环境中大气湿度太高，可能会引起电路板的短路，尤其是高温和易燃易爆的大气环境条件下，极可能引起火灾事故。光纤传感器则是把光信号转换为电信号，受环境因素制约较小。目前，光纤传感器已经广泛应用于航天、航空行业，医疗行业，能源工业以及制造业等科研领域[3]。……