裂纹长度对纳米裂纹应变传感器灵敏度的影响

杨圳威 刘军山

摘要：高灵敏度是纳米裂纹应变传感器相比传统的金属应变片最突出的特点，也是研究人员最关注的性能参数。裂纹长度对纳米裂纹应变传感器的灵敏度有很大影响，但相关研究鲜有报道。阐述了裂纹长度与纳米裂纹应变传感器灵敏度之间的关系，利用光刻工艺制作金属纳米裂纹的方法分别制作了裂纹长度为500μm和5000μm两种不同裂纹长度的纳米裂纹应变传感器，并通过材料试验机、数字万用表等设备组成的测试装置完成拉伸测试实验，探究了裂纹长度与传感器灵敏度的关系。结果表明，裂纹长度为5000μm的传感器量程为0～0.33%，满量程时的应变灵敏系数值为3933，裂纹长度为500μm的传感器量程为0～0.04%，满量程时的应变灵敏系数值为2100。然而，当这两种传感器承受的应变范围均为0～0.04%时，裂纹长度为500μm的传感器的应变灵敏系数大于裂纹长度为5000μm的传感器。因此，可以得出结论：裂纹长度越长，传感器量程越大，满量程时应变灵敏系数值越大，但是在相同的应变范围内短裂纹传感器的应变灵敏系数值更大。

关键词：纳米裂纹;应变传感器;裂纹长度;灵敏度

中图分类号：TP212文献标志码：A

文章编号：1009-9492（2021）11-0009-03

开放科学（资源服务）标识码（OSID）：

Effect of Crack Length on Sensitivity of Nanocrack-based Strain Sensor

Yang Zhenwei，Liu Junshan※

（Key Laboratory for Micro/Nano Technology and System of Liaoning Province， Dalian University of Technology， Dalian，Liaoning 116024， China）

Abstract： High sensitivity is the most outstanding characteristic of the nanocrack-based strain sensor compared with the traditional metal strain gauge， it is also the performance parameter that researchers pay most attention to. The sensitivity of the nanocrack-based strain sensor is greatly affected bythe crack length. However there are few studies on the relationship between the crack length and the sensitivity of the sensor. The relationship between the crack length and the sensitivity of the nanocrack-based strain sensor was described. Two nanocrack-based strain sensors with crack lengths of 500μm and 5000μm were fabricated by the method of producing metal nanocracks by photolithography， the tensile test experiments was completed through a test device composed of a material testing machine， a digital multimeter and other equipments， and the relationship between the crack length and the sensitivity of the sensor was explored. The results show that the sensor with a length of 5000μm has a strain range of 0～0.33%， the gauge factor （GF） is 3933 at full scale， the sensor with a crack length of 500μm has a strain range of 0～0.04%， and GF value is 2100 at full scale. However， the GF value of the sensor with a crack length of 500μm is larger than that of the sensor with a crack length of 5000μm. Therefore， it can be concluded that the longer the crack length， the larger range of the sensor， and the greater GF value at full scale. However， the sensor with a shorter crack length had a larger GF at the same strain range.Key words： nanocrack; strain sensor; crack length; sensitivity

0 引言

裂紋通常被认为是材料的缺陷或者是材料发生了失效，研究人员一直在研究如何避免裂纹的产生[1-2]。然而，近年来研究人员发现纳米裂纹可以用于制作各种微纳米器件，如制作纳米线条[3]、制作纳流控通道[4]、制作可控药物传递系统[5]、制作温度传感器[6]和应变传感器[7-9]。……